This project in collaboration with Arkema aims to design and develop novel block copolymers with enhanced resolution to target periodic mesostructures with sub-20 nm periodicity for both contact shrink and line/space applications. The postdoctoral fellow will as well study the self-assembly of such block copolymers in the thin film configuration in order to establish a baseline process for the integration of these materials in lithographic facilities.

Publié le 21/01/2018